Angle Sensor for Measurement of Surface Slope and Tilt Motion -- Laser Autocollimator for Measurement of Multi-axis Tilt Motion -- Surface Encoder for Measurement of In-plane Motion -- Grating Encoder for Measurement of In-plane and Out-of-plane Motion -- Scanning Multi-probe System for Measurement of Roundness -- Scanning Error Separation System for Measurement of Straightness -- Scanning Micro-stylus System for Measurement of Micro-aspherics -- Large Area Scanning Probe Microscope for Micro-textured Surfaces -- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures -- Scanning Image-sensor System for Measurement of Micro-dimensions.

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing.